Journals Information
Universal Journal of Electrical and Electronic Engineering Vol. 6(5B), pp. 1 - 6
DOI: 10.13189/ujeee.2019.061601
Reprint (PDF) (310Kb)
Effects of Laser Radiation on the Optical and Electrical Properties of ITO Thin Films Deposited by RF Sputtering
Aliyu Kabiru Isiyaku 1,2,*, Ahmad Hadi Ali 1, Nafarizal Nayan 3
1 Department of Physics and Chemistry, University Tun Hussein Onn Malaysia, Malaysia
2 Department of Physics, Kaduna State University, Nigeria
3 Microelectronic and Nanotechnology Shamsuddin Research Centre (MiNT-SRC), Universiti Tun Hussein Onn Malaysia, Malaysia
ABSTRACT
Annealing treatment of transparent conducting oxide (TCO) thin films plays a great role in enhancing the optoelectronic properties of the material. Changes in morphological, optical and electrical properties of indium tin oxide (ITO) thin films deposited by RF sputtering were investigated after exposing the films to Nd:YAG laser radiation. ITO thin films of 158 nm thickness were irradiated with different laser energy; 25 mJ, 75 mJ, 120 mJ and 165 mJ respectively. Atomic force microscopy (AFM) results reveal a smooth surface morphology and enhance grain size as the laser energy increases. Highest optical transmittance value of 96.5 % at 620 nm wavelength was obtained by film treated with 165 mJ laser energy as determined by UV-Vis spectrophotometer. Electrical resistivity measurements as determined by four-point probe show a significant decrease in resistivity and sheet resistance with respect to increasing laser energies. The ITO films optoelectronics properties were enhanced with the film annealed at 165 mJ exhibiting the highest calculated figure of merit. This laser treatment method has effectively fine turned the ITO films properties toward TCO functional properties required for solar cell application.
KEYWORDS
ITO, Laser-annealing, Nd:YAG Laser, RF Sputtering, Solar Cell, TCO
Cite This Paper in IEEE or APA Citation Styles
(a). IEEE Format:
[1] Aliyu Kabiru Isiyaku , Ahmad Hadi Ali , Nafarizal Nayan , "Effects of Laser Radiation on the Optical and Electrical Properties of ITO Thin Films Deposited by RF Sputtering," Universal Journal of Electrical and Electronic Engineering, Vol. 6, No. 5B, pp. 1 - 6, 2019. DOI: 10.13189/ujeee.2019.061601.
(b). APA Format:
Aliyu Kabiru Isiyaku , Ahmad Hadi Ali , Nafarizal Nayan (2019). Effects of Laser Radiation on the Optical and Electrical Properties of ITO Thin Films Deposited by RF Sputtering. Universal Journal of Electrical and Electronic Engineering, 6(5B), 1 - 6. DOI: 10.13189/ujeee.2019.061601.