Journals Information
Universal Journal of Materials Science Vol. 1(4), pp. 180 - 200
DOI: 10.13189/ujms.2013.010402
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About Controlling of Regimes of Heating during Growth a Heterostructures from Gas Phase
E.L. Pankratov 1,*, E.A. Bulaeva 2
1 Nizhny Novgorod State University, 23 Gagarin avenue, Nizhny Novgorod, 603950, Russia
2 Nizhny Novgorod State University of Architecture and Civil Engineering, 65 Il'insky Street, Nizhny Novgorod, 603950, Russia
ABSTRACT
In this paper we analyzed distribution of temperature in a reactor for epitaxial growth from gaze phase. Based on the analysis it has been formulated recommendations to increase homogeneity of distribution of temperature in depth of heterostructure, which has been grown in the reactor.
KEYWORDS
Gas Phase Epitaxy, Analytical Approach to Model of Epitaxy Process, Optimization of Epitaxy Process
Cite This Paper in IEEE or APA Citation Styles
(a). IEEE Format:
[1] E.L. Pankratov , E.A. Bulaeva , "About Controlling of Regimes of Heating during Growth a Heterostructures from Gas Phase," Universal Journal of Materials Science, Vol. 1, No. 4, pp. 180 - 200, 2013. DOI: 10.13189/ujms.2013.010402.
(b). APA Format:
E.L. Pankratov , E.A. Bulaeva (2013). About Controlling of Regimes of Heating during Growth a Heterostructures from Gas Phase. Universal Journal of Materials Science, 1(4), 180 - 200. DOI: 10.13189/ujms.2013.010402.