Journals Information
Advances in Energy and Power(CEASE PUBLICATION) Vol. 1(2), pp. 45 - 50
DOI: 10.13189/aep.2013.010201
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Decreasing Energy Costs in Epitaxial Growth from Gas Phase System by Optimization of Pressure
E.L. Pankratov 1,*, E.A. Bulaeva 2
1 Nizhny Novgorod State University, 23 Gagarin avenue, Nizhny Novgorod, 603950, Russia
2 Nizhny Novgorod State University of Architecture and Civil Engineering, 65 Il'insky street, Nizhny Novgorod, 603950, Russia
ABSTRACT
In this paper we introduce an approach to decrease energy costs during growth an epitaxial layers from gas phase by minimization velocity of flow of composition of gases (gas-carrier and materials in gas phase, which are used for formation epitaxial layer) after leaving epitaxial growth from gas phase system. As a result of minimization of the velocity one can obtain minimization of pressure of compressor and decreasing of energy cost of the epitaxial growth.
KEYWORDS
Epitaxial Growth from Gas Phase, Decreasing Energy Costs, Optimization Of Pressure
Cite This Paper in IEEE or APA Citation Styles
(a). IEEE Format:
[1] E.L. Pankratov , E.A. Bulaeva , "Decreasing Energy Costs in Epitaxial Growth from Gas Phase System by Optimization of Pressure," Advances in Energy and Power(CEASE PUBLICATION), Vol. 1, No. 2, pp. 45 - 50, 2013. DOI: 10.13189/aep.2013.010201.
(b). APA Format:
E.L. Pankratov , E.A. Bulaeva (2013). Decreasing Energy Costs in Epitaxial Growth from Gas Phase System by Optimization of Pressure. Advances in Energy and Power(CEASE PUBLICATION), 1(2), 45 - 50. DOI: 10.13189/aep.2013.010201.